iScript: A Domain-Adapted Large Language Model and Benchmark for Physical Design Tcl Script Generation

Presents iScript, a domain-adapted Qwen3-8B LLM for generating Innovus Tcl scripts for physical IC design, plus iScript-Bench (five task categories, three difficulty levels). Introduces a multi-stage synthetic-data pipeline (command extraction, static linting, requirement back-inference, Chain-of-Thought) producing a 10k (requirement, CoT, script) dataset. Training uses two-stage domain-adaptive pretraining followed by supervised fine-tuning. Proposes a two-step verification framework (static syntax checking and LLM-based functional evaluation) to assess script correctness. iScript outperforms